A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects
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چکیده
we present a reduced-order model of the squeezed-film damping phenomenon which is valid for flexible structures, large displacements (with respect to the gap) and small pressure variations (with respect to the ambient pressure). This reduced-order model is obtained by transforming the Reynolds equation into a form more amenable to modal projection techniques. Our approach is validated by comparison to simulated and experimental data. Moreover, we show that in several practical cases the “small pressure” hypothesis is not limitative, even when the gap becomes very small.
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